For ultra-thin layers on silicon wafers, the attenuated full reflection (ATR) method can significantly increase the sensitivity of the layer under investigation and can be a valuable tool especially in research and development.
BRUKER offers a wide range of dedicated accessories for these analyzes. As a result, it is possible to measure down to monolayers. FTIR microscopy can also monitor the distribution of these layers in space.
Do not hesitate to contact us in order to find the most suitable instrument solution for your analysis.